Recommended:

open h-4.bcf file with Bruker ESPRIT software
save from ESPRIT as h-4.raw (h-4.rpl is also generated)

import in temDM MSA
calibrate scale (0.67nm per pixel)
calibrate energy axis (10eV per channel,origin 48)
bin 2x2
apply gaussian filtering with sigma = 1.3

make matrix with full weighting ("E & X,Y")
you may limit the energy range up to, say, 12kV
proceed centered PCA with at least 2 components
reconstruct with 2 components.
Note that the data show interference between the detector and scanning frequency
The 2nd component is needed to compensate for that.

run script "ExtractMaps Si Ge EDX" having datacube in front
compare Si and Ge maps obtained from raw and reconstructed datacubes.